| Original language | American English |
|---|---|
| Patent number | 4,566,937 |
| State | Published - 1986 |
NREL Publication Number
- ACNR/PT-255-8204
Electron Beam Enhanced Surface Modification for Making Highly Resolved Structures
NREL (Inventor)
Research output: Patent
NREL (Inventor)
Research output: Patent
| Original language | American English |
|---|---|
| Patent number | 4,566,937 |
| State | Published - 1986 |