Electron Cyclotron Resonance Deposition of Amorphous Silicon Alloy Films and Devices, Final Subcontract Report, 1 April 1991 - 31 March 1992

doi:10.2172/7189217

Electron Cyclotron Resonance Deposition of Amorphous Silicon Alloy Films and Devices, Final Subcontract Report, 1 April 1991 - 31 March 1992

Research output: NREL › Subcontract Report

Original language	American English
Number of pages	59
DOIs	https://doi.org/10.2172/7189217
State	Published - 1992

Bibliographical note

Work performed by Jet Propulsion Laboratory, Pasadena, California

NREL Publication Number

NREL/TP-411-5123

Keywords

amorphous silicon
deposition
electronic devices
films
photovoltaics
solar cells

Access to Document

10.2172/7189217

https://www.nrel.gov/docs/legosti/old/5123.pdf

Cite this

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title = "Electron Cyclotron Resonance Deposition of Amorphous Silicon Alloy Films and Devices, Final Subcontract Report, 1 April 1991 - 31 March 1992",

keywords = "amorphous silicon, deposition, electronic devices, films, photovoltaics, solar cells",

author = "NREL",

note = "Work performed by Jet Propulsion Laboratory, Pasadena, California",

year = "1992",

doi = "10.2172/7189217",

language = "American English",

type = "Other",

}

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AU - NREL, null

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PY - 1992

Y1 - 1992

KW - amorphous silicon

KW - deposition

KW - electronic devices

KW - films

KW - photovoltaics

KW - solar cells

U2 - 10.2172/7189217

DO - 10.2172/7189217

M3 - Subcontract Report

ER -