Original language | American English |
---|---|
Pages (from-to) | 2597-2611 |
Number of pages | 15 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 6 |
Issue number | 4 |
DOIs | |
State | Published - 1988 |
NREL Publication Number
- SERI/JA-21149
Research output: Contribution to journal › Article
Original language | American English |
---|---|
Pages (from-to) | 2597-2611 |
Number of pages | 15 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 6 |
Issue number | 4 |
DOIs | |
State | Published - 1988 |