Electronic Structure of Silicon Nitride and Amorphous Silicon/Silicon Nitride Band Offsets by Electron Spectroscopy

doi:10.1063/1.337842

Electronic Structure of Silicon Nitride and Amorphous Silicon/Silicon Nitride Band Offsets by Electron Spectroscopy

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	2947-2954
Number of pages	8
Journal	Journal of Applied Physics
Volume	61
Issue number	8, Part I
DOIs	https://doi.org/10.1063/1.337842
State	Published - 1987

Bibliographical note

Work performed by Department of Materials Science and Engineering, Stanford University, Stanford, California; Xerox Palo Alto Research Center, Palo Alto, California; and Departments of Materials Science and Engineering, and Electrical Engineering, Stanford University, Stanford, California

NREL Publication Number

ACNR/JA-10676

Access to Document

10.1063/1.337842

Cite this

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title = "Electronic Structure of Silicon Nitride and Amorphous Silicon/Silicon Nitride Band Offsets by Electron Spectroscopy",

author = "NREL",

note = "Work performed by Department of Materials Science and Engineering, Stanford University, Stanford, California; Xerox Palo Alto Research Center, Palo Alto, California; and Departments of Materials Science and Engineering, and Electrical Engineering, Stanford University, Stanford, California",

year = "1987",

doi = "10.1063/1.337842",

language = "American English",

volume = "61",

pages = "2947--2954",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "8, Part I",

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AU - NREL, null

N1 - Work performed by Department of Materials Science and Engineering, Stanford University, Stanford, California; Xerox Palo Alto Research Center, Palo Alto, California; and Departments of Materials Science and Engineering, and Electrical Engineering, Stanford University, Stanford, California

PY - 1987

Y1 - 1987

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DO - 10.1063/1.337842

M3 - Article

SN - 0021-8979

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SP - 2947

EP - 2954

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 8, Part I

ER -