Epitaxial Growth from Organometallic Sources in High Vacuum

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)22-29
    Number of pages8
    JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
    Issue number1
    StatePublished - 1986

    Bibliographical note

    Work performed by Chevron Research Company, Richmond, California

    NREL Publication Number

    • ACNR/JA-7460

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