Epitaxial Growth from Organometallic Sources in High Vacuum

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	22-29
Number of pages	8
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	4
Issue number	1
DOIs	https://doi.org/10.1116/1.583445
State	Published - 1986

Work performed by Chevron Research Company, Richmond, California

NREL Publication Number

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title = "Epitaxial Growth from Organometallic Sources in High Vacuum",

author = "NREL",

note = "Work performed by Chevron Research Company, Richmond, California",

year = "1986",

doi = "10.1116/1.583445",

language = "American English",

volume = "4",

pages = "22--29",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

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publisher = "AVS Science and Technology Society",

number = "1",

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AU - NREL, null

N1 - Work performed by Chevron Research Company, Richmond, California

PY - 1986

Y1 - 1986

U2 - 10.1116/1.583445

DO - 10.1116/1.583445

M3 - Article

SN - 0734-211X

VL - 4

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EP - 29

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 1

ER -