Evidence for a Time Dependent Excitation Process in Silane Radio Frequency Glow Discharge

Research output: Contribution to journal › Article

NREL Publication Number

@article{aba1c2b73bbb4f0a865d6deb957123c8,

title = "Evidence for a Time Dependent Excitation Process in Silane Radio Frequency Glow Discharge",

author = "NREL",

year = "1983",

doi = "10.1063/1.332381",

language = "American English",

volume = "54",

pages = "2272--2275",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "5",

}