Evolution of Crystallinity in Mixed-Phase (a+..mu..c)-Si:H as Determined by Real Time Spectroscopic Ellipsometry

Research output: Contribution to conferencePaper

Original languageAmerican English
Pages539-544
Number of pages6
StatePublished - 2003
EventAmorphous and Nanocrystalline Silicon-Based Films 2003: Materials Research Society Symposium - San Francisco, California
Duration: 22 Apr 200325 Apr 2003

Conference

ConferenceAmorphous and Nanocrystalline Silicon-Based Films 2003: Materials Research Society Symposium
CitySan Francisco, California
Period22/04/0325/04/03

NREL Publication Number

  • NREL/CP-520-36064

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