Evolutionary Phase Diagrams for the Deposition of Silicon Films from Hydrogen-Diluted Silane

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Pages (from-to)43-47
Number of pages5
JournalJournal of Non-Crystalline Solids
Volume266-269
DOIs
StatePublished - 2000

Bibliographical note

Work performed by Pennsylvania State University, University Park, Pennsylvania

NREL Publication Number

  • NREL/JA-520-28656

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