Explanation of the Limiting Thickness Observed in Low-Temperature Silicon Epitaxy

Research output: Contribution to journal › Article › peer-review

NREL Publication Number

@article{e833c939dff34410b2da2c5b75ff9479,

title = "Explanation of the Limiting Thickness Observed in Low-Temperature Silicon Epitaxy",

author = "NREL",

year = "2000",

doi = "10.1063/1.1328767",

language = "American English",

volume = "77",

pages = "3589--3591",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "22",

}