Film Growth Mechanisms of Amorphous Silicon in Diode and Triode Glow Discharge Systems

Film Growth Mechanisms of Amorphous Silicon in Diode and Triode Glow Discharge Systems

Research output: Contribution to conference › Paper

Original language	American English
Pages	219-224
Number of pages	6
State	Published - 1987
Event	MRS Spring Meeting - Anaheim, California Duration: 21 Apr 1987 → 24 Apr 1987

Conference

Conference	MRS Spring Meeting
City	Anaheim, California
Period	21/04/87 → 24/04/87

Bibliographical note

Work performed by Xerox Palo Alto Research Center, Palo Alto, California

NREL Publication Number

ACNR/CP-10026

Cite this

@conference{9f3727fbc73b48baa5027692910a6f5d,

title = "Film Growth Mechanisms of Amorphous Silicon in Diode and Triode Glow Discharge Systems",

author = "NREL",

note = "Work performed by Xerox Palo Alto Research Center, Palo Alto, California; MRS Spring Meeting ; Conference date: 21-04-1987 Through 24-04-1987",

year = "1987",

language = "American English",

pages = "219--224",

}