Films and Devices Deposited by HWC VD at Ultra High Deposition Rates

Research output: Contribution to conferencePaper

Original languageAmerican English
PagesA3.3.1-A3.3.6
StatePublished - 2001
EventAmorphous and Heterogeneous Silicon-Based Films 2001: Materials Research Society Symposium - San Francisco, California
Duration: 16 Apr 200120 Apr 2001

Conference

ConferenceAmorphous and Heterogeneous Silicon-Based Films 2001: Materials Research Society Symposium
CitySan Francisco, California
Period16/04/0120/04/01

NREL Publication Number

  • NREL/CP-520-32929

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