Fluorinated Amorphous Silicon-Germanium Alloys Deposited from Disilane-Germane Mixture

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	1455-1458
Number of pages	4
Journal	Journal of Non-Crystalline Solids
Volume	97 & 98, Part II
DOIs	https://doi.org/10.1016/0022-3093(87)90349-8
State	Published - 1987

Work performed by Energy Conversion Devices, Inc., Troy, Michigan

NREL Publication Number

@article{7469ee3429c34532be1e9178bbf6ccf1,

title = "Fluorinated Amorphous Silicon-Germanium Alloys Deposited from Disilane-Germane Mixture",

author = "NREL",

note = "Work performed by Energy Conversion Devices, Inc., Troy, Michigan",

year = "1987",

doi = "10.1016/0022-3093(87)90349-8",

language = "American English",

volume = "97 & 98, Part II",

pages = "1455--1458",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Fluorinated Amorphous Silicon-Germanium Alloys Deposited from Disilane-Germane Mixture

AU - NREL, null

N1 - Work performed by Energy Conversion Devices, Inc., Troy, Michigan

PY - 1987

Y1 - 1987

U2 - 10.1016/0022-3093(87)90349-8

DO - 10.1016/0022-3093(87)90349-8

M3 - Article

SN - 0022-3093

VL - 97 & 98, Part II

SP - 1455

EP - 1458

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

ER -