| Original language | American English |
|---|---|
| Patent number | 4,761,302 |
| State | Published - 1988 |
NLR Publication Number
- ACNR/PT-212-14000
Fluorination of Amorphous Thin-Film Materials with Xenon Fluoride
- NREL (Inventor)
Research output: Patent
Research output: Patent
| Original language | American English |
|---|---|
| Patent number | 4,761,302 |
| State | Published - 1988 |