Fluorine-Induced Microvoids in Amorphous Silicon

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Pages181-186
    Number of pages6
    StatePublished - 1989
    EventMRS Spring Meeting - San Diego, California
    Duration: 25 Apr 198928 Apr 1989

    Conference

    ConferenceMRS Spring Meeting
    CitySan Diego, California
    Period25/04/8928/04/89

    NREL Publication Number

    • ACNR/CP-212-11587

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