Formation and Behavior of Particles in Silane Discharges

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Number of pages10
    StatePublished - 1999
    EventMaterials Research Society Symposium - San Francisco, California
    Duration: 5 Apr 19999 Apr 1999


    ConferenceMaterials Research Society Symposium
    CitySan Francisco, California

    Bibliographical note

    Work performed by JILA, University of Colorado and National Institute for Standards and Technology, Boulder, Colorado

    NREL Publication Number

    • NREL/CP-520-28439

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