Formation and Behavior of Particles in Silane Discharges

Formation and Behavior of Particles in Silane Discharges

Research output: Contribution to conference › Paper

Original language	American English
Pages	3-12
Number of pages	10
State	Published - 1999
Event	Materials Research Society Symposium - San Francisco, California Duration: 5 Apr 1999 → 9 Apr 1999

Conference

Conference	Materials Research Society Symposium
City	San Francisco, California
Period	5/04/99 → 9/04/99

Bibliographical note

Work performed by JILA, University of Colorado and National Institute for Standards and Technology, Boulder, Colorado

NREL Publication Number

NREL/CP-520-28439

Cite this

@conference{8ee1bbac8214448686882f39f42e0351,

title = "Formation and Behavior of Particles in Silane Discharges",

author = "NREL",

note = "Work performed by JILA, University of Colorado and National Institute for Standards and Technology, Boulder, Colorado; Materials Research Society Symposium ; Conference date: 05-04-1999 Through 09-04-1999",

year = "1999",

language = "American English",

pages = "3--12",

}