Formation and Elimination of Growth Defects in Liquid Phase Epitaxy of Silicon

Research output: Contribution to conference › Paper

Original language	American English
Number of pages	8
State	Published - 1994
Event	Role of Point Defects/Defect Complexes in Silicon Device Processing: Fourth Workshop - Beaver Creek, Colorado Duration: 27 Jun 1994 → 29 Jun 1994

Conference	Role of Point Defects/Defect Complexes in Silicon Device Processing: Fourth Workshop
City	Beaver Creek, Colorado
Period	27/06/94 → 29/06/94

NREL Publication Number