Formation of Submicron Oxide Widths on Aluminum in the Presence of a 2 keV Electron Beam and CO2 or N20

J. R. Pitts, T. P. Massopust, A. W. Czanderna, L. L. Kazmerski

Research output: Contribution to journalArticle

3 Scopus Citations
Original languageAmerican English
Pages (from-to)241-243
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number2
StatePublished - 1 Mar 1986

NREL Publication Number

  • ACNR/JA-255-7438

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