Fundamental Processes in Sputtering of Relevance to the Fabrication of Thin Film Solar Cells

Research output: Contribution to journal › Article

Work performed by Department of Material Science and Coordinated Science Laboratory, University of Illinois, Urbana, Illinois

NLR Publication Number

@article{4a45ad9eb4e4462fa433baeb94bdd44c,

title = "Fundamental Processes in Sputtering of Relevance to the Fabrication of Thin Film Solar Cells",

author = "NREL",

note = "Work performed by Department of Material Science and Coordinated Science Laboratory, University of Illinois, Urbana, Illinois",

year = "1987",

doi = "10.1016/0379-6787(87)90103-7",

language = "American English",

volume = "21",

pages = "41--54",

journal = "Solar Cells",

issn = "0379-6787",

publisher = "Elsevier B.V.",

number = "Complete",

}

TY - JOUR

T1 - Fundamental Processes in Sputtering of Relevance to the Fabrication of Thin Film Solar Cells

AU - NREL, null

N1 - Work performed by Department of Material Science and Coordinated Science Laboratory, University of Illinois, Urbana, Illinois

PY - 1987

Y1 - 1987

U2 - 10.1016/0379-6787(87)90103-7

DO - 10.1016/0379-6787(87)90103-7

M3 - Article

SN - 0379-6787

VL - 21

SP - 41

EP - 54

JO - Solar Cells

JF - Solar Cells

IS - Complete

ER -