@misc{f2ea5917de8643e2a5e6ebb5ae2cc0fa,
title = "Fundamental Studies of Defect Generation in Amorphous Silicon Alloys Grown by Remote Plasma-Enhanced Chemical Vapor Deposition (Remote PECVD), Annual Subcontract Report, 1 September 1990 - 31 August 1991",
keywords = "alloys, amorphous silicon, high efficiency, modules, photovoltaics, PVCVD desposition, solar cells",
author = "NREL",
note = "Work performed by North Carolina State University, Raleigh, North Carolina",
year = "1993",
doi = "10.2172/6796766",
language = "American English",
type = "Other",
}