Gas and Surface Processes Leading to Hydrogenated Amorphous Silicon Films

Research output: NREL › Technical Report

Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado and National Bureau of Standards, Boulder, Colorado

NREL Publication Number

@misc{257812eb897b459c8a2ed60ffb4a5698,

title = "Gas and Surface Processes Leading to Hydrogenated Amorphous Silicon Films",

author = "NREL",

note = "Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado and National Bureau of Standards, Boulder, Colorado",

year = "1987",

doi = "10.1016/0379-6787(87)90114-1",

language = "American English",

type = "Other",

}