Glow Discharge Produced Amorphous SiC:H Thin Films

Glow Discharge Produced Amorphous SiC:H Thin Films

Research output: Contribution to conference › Paper

Original language	American English
Pages	325-330
Number of pages	6
State	Published - 1986
Event	Materials Research Society Spring Meeting - Palo Alto, California Duration: 15 Apr 1986 → 18 Apr 1986

Conference

Conference	Materials Research Society Spring Meeting
City	Palo Alto, California
Period	15/04/86 → 18/04/86

Bibliographical note

Work performed by Electronic and Information Sector Laboratories, Minnesota Mining and Manufacturing Company, St. Paul, Minnesota

NREL Publication Number

ACNR/CP-8308

Cite this

@conference{9ae3fc871aa04fb280c5921f533a22f7,

title = "Glow Discharge Produced Amorphous SiC:H Thin Films",

author = "NREL",

note = "Work performed by Electronic and Information Sector Laboratories, Minnesota Mining and Manufacturing Company, St. Paul, Minnesota; Materials Research Society Spring Meeting ; Conference date: 15-04-1986 Through 18-04-1986",

year = "1986",

language = "American English",

pages = "325--330",

}