Glow Discharge Produced Amorphous SiC:H Thin Films

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Number of pages6
    StatePublished - 1986
    EventMaterials Research Society Spring Meeting - Palo Alto, California
    Duration: 15 Apr 198618 Apr 1986


    ConferenceMaterials Research Society Spring Meeting
    CityPalo Alto, California

    Bibliographical note

    Work performed by Electronic and Information Sector Laboratories, Minnesota Mining and Manufacturing Company, St. Paul, Minnesota

    NREL Publication Number

    • ACNR/CP-8308

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