Growth and Chemical Substitution of Transparent P-Type CuAlO2

R. E. Stauber, P. A. Parilla, J. D. Perkins, D. S. Ginley

Research output: Contribution to conferencePaperpeer-review

9 Scopus Citations


CuAlO2 is one of several materials currently being investigated for application as a p-type transparent conducting oxide. In this paper we report a method of making c-axis oriented CuAlO2 thin films which eliminates previously reported phase-purity and surface morphology problems. Thin film precursors of CuAlO2 were deposited on YSZ (100) substrates by room-temperature radio frequency sputtering. Subsequent annealing in 10mT of oxygen at temperatures as low as 800°C resulted in phase-pure, textured CuAlO2. The films were p-type and transparent with a gap of 3.5eV, but typical carrier concentrations were low (on the order of 1016 cm-3). Oxygen anneals at 700°C in 1 atm of O2 raised this to 1018 cm-3 in some samples. In order to increase the carrier concentration further, we are testing chemical substitution on the metal sublattice. Initial experiments were done with Mg as a dopant, either by direct solid-state synthesis for bulk materials or by alternating deposition of MgO and CuAlO2 during the pulsed laser deposition of thin films. At Mg molar concentrations of 1% or less, the bulk material was phase-pure CuAlO2 by x-ray diffraction, but was mixed-phase CuAl2O4 and CuO when the Mg concentration was increased to 2%. Thin films sputtered from the 1% Mg substituted target crystallized to CuAlO2 after a 940°C anneal at 10T O2, but were more than 30 times more resistive than the undoped films.

Original languageAmerican English
Number of pages6
StatePublished - 2000
Externally publishedYes
EventMaterials Science of Novel Oxide-Based Electronics: Materials Research Society Symposium - San Francisco, California
Duration: 24 Apr 200027 Apr 2000


ConferenceMaterials Science of Novel Oxide-Based Electronics: Materials Research Society Symposium
CitySan Francisco, California

NREL Publication Number

  • NREL/CP-520-30597


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