Growth of Epitaxial Silicon at Low Temperatures Using Hot Wire Chemical Vapor Deposition

Research output: Contribution to journal › Article › peer-review

NREL Publication Number

@article{2a46e8c6731b4347b45400070f2e160b,

title = "Growth of Epitaxial Silicon at Low Temperatures Using Hot Wire Chemical Vapor Deposition",

author = "NREL",

year = "1999",

doi = "10.1063/1.124576",

language = "American English",

volume = "75",

pages = "992--994",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "7",

}