Growth of Homo-Epitaxial Silicon at Low Temperatures Using Hot Wire Chemical Vapor Deposition

Research output: Contribution to conferencePaper

Original languageAmerican English
Pages261-271
Number of pages11
StatePublished - 1999
EventEpitaxial Growth: Principles and Applications: Materials Research Society Spring Conference - San Francisco, California
Duration: 6 Apr 199910 Apr 1999

Conference

ConferenceEpitaxial Growth: Principles and Applications: Materials Research Society Spring Conference
CitySan Francisco, California
Period6/04/9910/04/99

NREL Publication Number

  • NREL/CP-520-27863

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