Growth of Homo-Epitaxial Silicon at Low Temperatures Using Hot Wire Chemical Vapor Deposition

Engineering

• Low-Temperature 100%
• Chemical Vapor Deposition 100%
• Vapor Deposition 100%
• Growth Process 50%
• Data Show 50%
• High Growth Rate 50%
• Vapor Deposition Method 50%
• Deposition System 50%
• Impurity Level 50%
• Defect Density 50%
• Channelling 50%
• Scanning Electron Microscope 50%
• Epitaxial Film 50%

Material Science

• Silicon 100%
• Chemical Vapor Deposition 100%
• Defect Density 50%
• Scanning Electron Microscopy 50%
• Epitaxial Film 50%