Abstract
Reflectance spectroscopy is very well-suited for measuring physical parameters of semiconductor wafers, and of surface structures (continuous or patterned) deposited on them as thin films. We have developed a reflectometer (PV-Reflectometer) that can measure physical parameters of wafers, wafer surfaces, and other materials deposited during solar cell fabrication. Concomitantly, PV Reflectometercan also be applied for monitoring various cell fabrication processes.
| Original language | American English |
|---|---|
| Pages | 308-314 |
| Number of pages | 7 |
| State | Published - 2002 |
| Event | 12th Workshop on Crystalline Silicon Solar Cell Materials and Processes - Breckenridge, Colorado Duration: 11 Aug 2002 → 14 Aug 2002 |
Conference
| Conference | 12th Workshop on Crystalline Silicon Solar Cell Materials and Processes |
|---|---|
| City | Breckenridge, Colorado |
| Period | 11/08/02 → 14/08/02 |
NREL Publication Number
- NREL/CP-520-32725
Keywords
- 12th workshop
- crystalline silicon (x-Si) (c-Si)
- PV
- solar cell materials