H-Diffusion Mechanism(s) in PECVD Nitride Passivation of Si Solar Cells: Preprint

H-Diffusion Mechanism(s) in PECVD Nitride Passivation of Si Solar Cells: Preprint

Research output: Contribution to conference › Paper

Abstract

Presented at the 2001 NCPV Program Review Meeting: Modeled diffusion of H in 2-step Si3N4 passivation process invoking concept of storage of H. H stored during nitridation is redistributed during subsequent anneal.

Original language	American English
Number of pages	4
State	Published - 2001
Event	NCPV Program Review Meeting - Lakewood, Colorado Duration: 14 Oct 2001 → 17 Oct 2001

Conference

Conference	NCPV Program Review Meeting
City	Lakewood, Colorado
Period	14/10/01 → 17/10/01

NREL Publication Number

NREL/CP-520-31002

Keywords

H diffusion
modeling
nitridation
passivation
PV
RTP
Si3N4

Access to Document

https://www.nrel.gov/docs/fy02osti/31002.pdf

Cite this

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title = "H-Diffusion Mechanism(s) in PECVD Nitride Passivation of Si Solar Cells: Preprint",

abstract = "Presented at the 2001 NCPV Program Review Meeting: Modeled diffusion of H in 2-step Si3N4 passivation process invoking concept of storage of H. H stored during nitridation is redistributed during subsequent anneal.",

keywords = "H diffusion, modeling, nitridation, passivation, PV, RTP, Si3N4",

author = "NREL",

year = "2001",

language = "American English",

note = "NCPV Program Review Meeting ; Conference date: 14-10-2001 Through 17-10-2001",

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TY - CONF

T1 - H-Diffusion Mechanism(s) in PECVD Nitride Passivation of Si Solar Cells: Preprint

AU - NREL, null

PY - 2001

Y1 - 2001

N2 - Presented at the 2001 NCPV Program Review Meeting: Modeled diffusion of H in 2-step Si3N4 passivation process invoking concept of storage of H. H stored during nitridation is redistributed during subsequent anneal.

AB - Presented at the 2001 NCPV Program Review Meeting: Modeled diffusion of H in 2-step Si3N4 passivation process invoking concept of storage of H. H stored during nitridation is redistributed during subsequent anneal.

KW - H diffusion

KW - modeling

KW - nitridation

KW - passivation

KW - PV

KW - RTP

KW - Si3N4

M3 - Paper

T2 - NCPV Program Review Meeting

Y2 - 14 October 2001 through 17 October 2001

ER -

H-Diffusion Mechanism(s) in PECVD Nitride Passivation of Si Solar Cells: Preprint

Abstract

Conference

NREL Publication Number

Keywords

Access to Document

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Cite this