He-Dilution to Increase Deposition Rate and Feedstock Utilization During the Growth of a-Si:H and a-SiGe:H Alloys

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Number of pages6
    StatePublished - 1999
    EventMaterials Research Society Symposium - San Francisco, California
    Duration: 5 Apr 19999 Apr 1999


    ConferenceMaterials Research Society Symposium
    CitySan Francisco, California

    Bibliographical note

    Work performed by Solarex, a Business Unit of BP/Amoco Solar, Toano, Virginia

    NREL Publication Number

    • NREL/CP-520-28446

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