He-Dilution to Increase Deposition Rate and Feedstock Utilization During the Growth of a-Si:H and a-SiGe:H Alloys

He-Dilution to Increase Deposition Rate and Feedstock Utilization During the Growth of a-Si:H and a-SiGe:H Alloys

Research output: Contribution to conference › Paper

Original language	American English
Pages	151-156
Number of pages	6
State	Published - 1999
Event	Materials Research Society Symposium - San Francisco, California Duration: 5 Apr 1999 → 9 Apr 1999

Conference

Conference	Materials Research Society Symposium
City	San Francisco, California
Period	5/04/99 → 9/04/99

Bibliographical note

Work performed by Solarex, a Business Unit of BP/Amoco Solar, Toano, Virginia

NREL Publication Number

NREL/CP-520-28446

Cite this

@conference{a4b6cfe7d16249fa9a5def02886b708c,

title = "He-Dilution to Increase Deposition Rate and Feedstock Utilization During the Growth of a-Si:H and a-SiGe:H Alloys",

author = "NREL",

note = "Work performed by Solarex, a Business Unit of BP/Amoco Solar, Toano, Virginia; Materials Research Society Symposium ; Conference date: 05-04-1999 Through 09-04-1999",

year = "1999",

language = "American English",

pages = "151--156",

}