High Deposition Rate Studies of Hydrogenated Amorphous Silicon

High Deposition Rate Studies of Hydrogenated Amorphous Silicon

Research output: Contribution to conference › Paper

Original language	American English
Pages	499-502
Number of pages	4
State	Published - 1985
Event	Eighteenth IEEE Photovoltaic Specialists Conference-1985 - Las Vegas, Nevada Duration: 21 Oct 1985 → 25 Oct 1985

Conference

Conference	Eighteenth IEEE Photovoltaic Specialists Conference-1985
City	Las Vegas, Nevada
Period	21/10/85 → 25/10/85

Bibliographical note

Work performed by 3M Electronic and Information Sector Laboratories, Saint Paul, Minnesota

NREL Publication Number

ACNR/CP-7814

Cite this

@conference{9f6dfbe72137481380cd64788fc9a7af,

title = "High Deposition Rate Studies of Hydrogenated Amorphous Silicon",

author = "NREL",

note = "Work performed by 3M Electronic and Information Sector Laboratories, Saint Paul, Minnesota; Eighteenth IEEE Photovoltaic Specialists Conference-1985 ; Conference date: 21-10-1985 Through 25-10-1985",

year = "1985",

language = "American English",

pages = "499--502",

}