High Quality a-Si:H Films Grown at High Deposition Rates

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Number of pages6
    StatePublished - 1999
    EventMaterials Research Society Symposium - San Francisco, California
    Duration: 5 Apr 19999 Apr 1999


    ConferenceMaterials Research Society Symposium
    CitySan Francisco, California

    Bibliographical note

    Work performed by Department of Physics, University of Oregon, Eugene, Oregon, Electrotechnical Laboratory, Tsukuba-shi, Ibaraki 305, Japan, and Solarex, Toano, Virginia

    NREL Publication Number

    • NREL/CP-520-28445

    Cite this