High Quality Transparent Conducting Oxide Thin Films

Timothy Gessert (Inventor)

Research output: Patent


A transparent conducting oxide (TCO) film comprising: a TCO layer, and dopants selected from the elements consisting of Vanadium, Molybdenum, Tantalum, Niobium, Antimony, Titanium, Zirconium, and Hafnium, wherein the elements are n-type dopants; and wherein the transparent conducting oxide is characterized by an improved electron mobility of about 42 cm.sup.2/V-sec while simultaneouslymaintaining a high carrier density of .about.4.4e.times.10.sup.20 cm.sup.-3.
Original languageAmerican English
Patent number8,253,012
StatePublished - 2012

NREL Publication Number

  • NREL/PT-5200-56465


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