@conference{316b4d4d048449fa984f362d1bf1e0c6,
title = "High Rate Hot-Wire Chemical Vapor Deposition of Silicon Thin Films Using a Stable TaC Covered Graphite Filament",
keywords = "hot-wire chemical vapor deposition (HWCVD), silicon thin films",
author = "Charles Teplin and Ina Martin and James Portugal and John Mariner",
year = "2011",
doi = "10.1016/j.tsf.2011.01.322",
language = "American English",
pages = "4585--4588",
note = "Sixth International Conference on Hot-Wire CVD (Cat-CVD) Process ; Conference date: 13-09-2010 Through 17-09-2010",
}