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High Rate Hot-Wire Chemical Vapor Deposition of Silicon Thin Films Using a Stable TaC Covered Graphite Filament
Ina T. Martin, Charles W. Teplin, Paul Stradins, Marc Landry, Maxim Shub, Robert C. Reedy, Bobby To, James V. Portugal, John T. Mariner
Research output: Contribution to conference › Paper › peer-review
16
Scopus Citations