High Rate Photochemical Deposition of Amorphous Silicon from Higher Silanes

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)833-836
    Number of pages4
    JournalJournal of Non-Crystalline Solids
    Volume77 & 78
    Issue numberPart II
    StatePublished - 1985

    Bibliographical note

    Work performed by Chronar Corporation, Princeton, New Jersey

    NREL Publication Number

    • ACNR/JA-7277

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