@misc{63f2c44321fb46358d71ce6790ecd937,
title = "High-Transparency Sputtered In2O3 and ITO Films Containing Zirconium (Presentation)",
abstract = "Our recent investigations have identified a method to produce ITO-like films that are less sensitive to variations in the oxygen-containing deposition ambient. Specifically, we are studying the effect of adding small amounts of Zr to both In2O3 and ITO ceramic sputtering targets.",
keywords = "large-area, optimum electrical properties, oxygen-containing deposition, PV, sputter, thin films, tin-doped In2O3 (ITO), zirconium",
author = "Timothy Gessert",
year = "2007",
language = "American English",
series = "Prepared for the AVS 54th International Symposium & Exhibition, 14-17 October 2007, Seattle, Washington.",
type = "Other",
}