Highly Conducting ZnSe Films by Reactive Magnetron Sputtering

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	403-407
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	4
Issue number	3, Part I
DOIs	https://doi.org/10.1116/1.573891
State	Published - 1986

Work performed by Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California

NREL Publication Number

@article{04c35ab5bf824241860050540be9367c,

title = "Highly Conducting ZnSe Films by Reactive Magnetron Sputtering",

author = "NREL",

note = "Work performed by Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California",

year = "1986",

doi = "10.1116/1.573891",

language = "American English",

volume = "4",

pages = "403--407",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "3, Part I",

}

TY - JOUR

T1 - Highly Conducting ZnSe Films by Reactive Magnetron Sputtering

AU - NREL, null

N1 - Work performed by Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California

PY - 1986

Y1 - 1986

U2 - 10.1116/1.573891

DO - 10.1116/1.573891

M3 - Article

SN - 0734-2101

VL - 4

SP - 403

EP - 407

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 3, Part I

ER -