Abstract
We report on the pulsed laser deposition (PLD) of Mo-doped indium oxide (IMO) films with mobilities of up to 125 cm2/Vsec. Films have been grown from targets with 1-4 wt. % molybdenum. The optimum electrical and optical properties were obtained with the 2% target and yielded a maximum conductivity of 3717 S/cm with mobilities of 99 cm2/V-sec on (100) yttria stabilized zirconia (YSZ) singlecrystal substrates. Films also exhibit greater than 90% transparency in the visible range. Compared to commercial indium tin oxide (ITO) films, these PLD-grown IMO films have similar conductivity but since they have substantially higher mobility they have a correspondingly lower carrier concentration. The lower carrier concentration should extend the infrared window of the transparency for filmsof the same conductivity. This may lead to improved performance in a number of applications requiring improved performance TCOs.
| Original language | American English |
|---|---|
| Number of pages | 6 |
| State | Published - 2003 |
| Event | National Center for Photovoltaics (NCPV) and Solar Program Review Meeting - Denver, Colorado Duration: 24 Mar 2003 → 26 Mar 2003 |
Conference
| Conference | National Center for Photovoltaics (NCPV) and Solar Program Review Meeting |
|---|---|
| City | Denver, Colorado |
| Period | 24/03/03 → 26/03/03 |
NREL Publication Number
- NREL/CP-520-33596
Keywords
- IMO
- pulsed laser deposition
- solar cells
- TCO
- thin films