Highly Conductive Textured Molybdenum Doped Indium Oxide Thin Films

Research output: Contribution to conferencePaper

Abstract

We report on the pulsed laser deposition (PLD) of Mo-doped indium oxide (IMO) films with mobilities of up to 125 cm2/Vsec. Films have been grown from targets with 1-4 wt. % molybdenum. The optimum electrical and optical properties were obtained with the 2% target and yielded a maximum conductivity of 3717 S/cm with mobilities of 99 cm2/V-sec on (100) yttria stabilized zirconia (YSZ) singlecrystal substrates. Films also exhibit greater than 90% transparency in the visible range. Compared to commercial indium tin oxide (ITO) films, these PLD-grown IMO films have similar conductivity but since they have substantially higher mobility they have a correspondingly lower carrier concentration. The lower carrier concentration should extend the infrared window of the transparency for filmsof the same conductivity. This may lead to improved performance in a number of applications requiring improved performance TCOs.
Original languageAmerican English
Number of pages6
StatePublished - 2003
EventNational Center for Photovoltaics (NCPV) and Solar Program Review Meeting - Denver, Colorado
Duration: 24 Mar 200326 Mar 2003

Conference

ConferenceNational Center for Photovoltaics (NCPV) and Solar Program Review Meeting
CityDenver, Colorado
Period24/03/0326/03/03

NREL Publication Number

  • NREL/CP-520-33596

Keywords

  • IMO
  • pulsed laser deposition
  • solar cells
  • TCO
  • thin films

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