Homogeneous and Heterogeneous Thermal Decomposition Rates of Trimethylgallium and Arsine and Their Relevance to the Growth of GaAs by MOCVD

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)188-193
    Number of pages6
    JournalJournal of Crystal Growth
    Issue number1-3
    StatePublished - 1986

    Bibliographical note

    Work performed by Department of Electrical Engineering and Materials Science and Center for Photonic Technology, University of Southern California, Los Angeles, California

    NREL Publication Number

    • ACNR/JA-9664

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