Homogeneous Chemical Vapor Deposition

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)Part 1; 450-456
    Number of pages7
    JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
    Issue number2
    StatePublished - 1984

    Bibliographical note

    Work performed by IBM Thomas J. Watson Research Center, Yorktown Heights, New York

    NREL Publication Number

    • ACNR/JA-4113

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