Original language | American English |
---|---|
Pages (from-to) | Part 1; 450-456 |
Number of pages | 7 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 2 |
Issue number | 2 |
DOIs | |
State | Published - 1984 |
Bibliographical note
Work performed by IBM Thomas J. Watson Research Center, Yorktown Heights, New YorkNREL Publication Number
- ACNR/JA-4113