Hot-Wire Chemical Vapor Deposition of Poly-Si in Diluted Silane

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Pages160-166
    Number of pages7
    StatePublished - 1999
    EventNinth Workshop on Crystalline Silicon Solar Cell Materials and Processes - Breckenridge, Colorado
    Duration: 9 Aug 199911 Aug 1999

    Conference

    ConferenceNinth Workshop on Crystalline Silicon Solar Cell Materials and Processes
    CityBreckenridge, Colorado
    Period9/08/9911/08/99

    Bibliographical note

    Work performed by California Institute of Technology, Pasadena, California

    NREL Publication Number

    • NREL/CP-27191

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