Hot-Wire Deposition of Photonic-Grade Amorphous Silicon

Research output: Contribution to journal › Article › peer-review

NREL Publication Number

@article{aea0a1104633444aa1815dbe61efcbef,

title = "Hot-Wire Deposition of Photonic-Grade Amorphous Silicon",

author = "NREL",

year = "2001",

doi = "10.1016/S0040-6090(01)01239-1",

language = "American English",

volume = "395",

pages = "142--146",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "1-2",

}