Hydrogen Diffusion and Passivation Mechanisms

Hydrogen Diffusion and Passivation Mechanisms

Research output: Contribution to conference › Paper

Original language	American English
Pages	99-106
Number of pages	8
State	Published - 1994
Event	Role of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop - Vail, Colorado Duration: 16 Aug 1993 → 18 Aug 1993

Conference

Conference	Role of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop
City	Vail, Colorado
Period	16/08/93 → 18/08/93

Bibliographical note

Work performed by Department of Mechanical Engineering and Materials Science, Duke University, Durham, North Carolina Work performed by Physics Department, Texas Tech University, Lubbock, Texas

NREL Publication Number

ACNR/CP-15590

Cite this

@conference{7a121f92ca9042d4b685cab8e148de15,

title = "Hydrogen Diffusion and Passivation Mechanisms",

author = "NREL",

note = "Work performed by Department of Mechanical Engineering and Materials Science, Duke University, Durham, North Carolina Work performed by Physics Department, Texas Tech University, Lubbock, Texas; Role of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop ; Conference date: 16-08-1993 Through 18-08-1993",

year = "1994",

language = "American English",

pages = "99--106",

}

TY - CONF

T1 - Hydrogen Diffusion and Passivation Mechanisms

AU - NREL, null

N1 - Work performed by Department of Mechanical Engineering and Materials Science, Duke University, Durham, North Carolina Work performed by Physics Department, Texas Tech University, Lubbock, Texas

PY - 1994

Y1 - 1994

M3 - Paper

SP - 99

EP - 106

T2 - Role of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop

Y2 - 16 August 1993 through 18 August 1993

ER -