Hydrogen Dilution Profiling for Hydrogenated Microcrystalline Silicon Solar Cells

Baojie Yan, Guozhen Yue, Jeffrey Yang, Subhendu Guha, D. L. Williamson, Daxing Han, Chun Sheng Jiang

Research output: Contribution to journalArticlepeer-review

115 Scopus Citations


The investigation of the structural properties of hydrogenated microcrystalline silicon solar cells using Raman, X-ray diffraction and atomic force microscopy was discussed. A significant increase of microcrystalline volume fraction and grain size with increasing film thickness was shown. It was suggested that the increase of grain size and microcrystalline volume fraction with thickness was the main reason for the deterioration of cell performance as the intrinsic layer thickness increases. It was found that by varying the hydrogen dilution in the gas mixture during deposition, microstructure evolution has been controlled and cell performance significantly improved.

Original languageAmerican English
Pages (from-to)1955-1957
Number of pages3
JournalApplied Physics Letters
Issue number11
StatePublished - 2004

NREL Publication Number

  • NREL/JA-520-37465


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