Hydrogen Dilution Profiling for Hydrogenated Microcrystalline Silicon Solar Cells

Baojie Yan; Guozhen Yue; Jeffrey Yang; Subhendu Guha; D. L. Williamson; Daxing Han; Chun Sheng Jiang

doi:10.1063/1.1788877

Hydrogen Dilution Profiling for Hydrogenated Microcrystalline Silicon Solar Cells

Baojie Yan, Guozhen Yue, Jeffrey Yang, Subhendu Guha, D. L. Williamson, Daxing Han, Chun Sheng Jiang

Materials Science

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Abstract

The investigation of the structural properties of hydrogenated microcrystalline silicon solar cells using Raman, X-ray diffraction and atomic force microscopy was discussed. A significant increase of microcrystalline volume fraction and grain size with increasing film thickness was shown. It was suggested that the increase of grain size and microcrystalline volume fraction with thickness was the main reason for the deterioration of cell performance as the intrinsic layer thickness increases. It was found that by varying the hydrogen dilution in the gas mixture during deposition, microstructure evolution has been controlled and cell performance significantly improved.

Original language	American English
Pages (from-to)	1955-1957
Number of pages	3
Journal	Applied Physics Letters
Volume	85
Issue number	11
DOIs	https://doi.org/10.1063/1.1788877 https://doi.org/10.1063/1.1788877
State	Published - 2004

NREL Publication Number

NREL/JA-520-37465

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author = "Baojie Yan and Guozhen Yue and Jeffrey Yang and Subhendu Guha and Williamson, {D. L.} and Daxing Han and Jiang, {Chun Sheng}",

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AU - Yan, Baojie

AU - Yue, Guozhen

AU - Yang, Jeffrey

AU - Guha, Subhendu

AU - Williamson, D. L.

AU - Han, Daxing

AU - Jiang, Chun Sheng

PY - 2004

Y1 - 2004

N2 - The investigation of the structural properties of hydrogenated microcrystalline silicon solar cells using Raman, X-ray diffraction and atomic force microscopy was discussed. A significant increase of microcrystalline volume fraction and grain size with increasing film thickness was shown. It was suggested that the increase of grain size and microcrystalline volume fraction with thickness was the main reason for the deterioration of cell performance as the intrinsic layer thickness increases. It was found that by varying the hydrogen dilution in the gas mixture during deposition, microstructure evolution has been controlled and cell performance significantly improved.

AB - The investigation of the structural properties of hydrogenated microcrystalline silicon solar cells using Raman, X-ray diffraction and atomic force microscopy was discussed. A significant increase of microcrystalline volume fraction and grain size with increasing film thickness was shown. It was suggested that the increase of grain size and microcrystalline volume fraction with thickness was the main reason for the deterioration of cell performance as the intrinsic layer thickness increases. It was found that by varying the hydrogen dilution in the gas mixture during deposition, microstructure evolution has been controlled and cell performance significantly improved.

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U2 - 10.1063/1.1788877

DO - 10.1063/1.1788877

M3 - Article

AN - SCOPUS:5444243125

SN - 0003-6951

VL - 85

SP - 1955

EP - 1957

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 11

ER -

Hydrogen Dilution Profiling for Hydrogenated Microcrystalline Silicon Solar Cells

Abstract

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