Hydrogen in Silicon: Current Understanding of Diffusion and Passivation Mechanisms

B. L. Sopori, X. Deng, J. P. Benner, A. Rohatgi, P. Sana, S. K. Estreicher, Y. K. Park, M. A. Roberson

Research output: Contribution to conference › Paper › peer-review

5 Scopus Citations

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Biochemistry, Genetics and Molecular Biology