Hydrogen-Plasma Reactive Flush for a-Si:H and a-SiGe:H Solar Cell Fabrication

Hydrogen-Plasma Reactive Flush for a-Si:H and a-SiGe:H Solar Cell Fabrication

Research output: Contribution to conference › Paper

Original language	American English
Pages	1416-1419
Number of pages	4
State	Published - 1990
Event	Twenty First IEEE Photovoltaic Specialists Conference - 1990 - Kissimmee, Florida Duration: 21 May 1990 → 25 May 1990

Conference

Conference	Twenty First IEEE Photovoltaic Specialists Conference - 1990
City	Kissimmee, Florida
Period	21/05/90 → 25/05/90

Bibliographical note

Work performed at Solar Energy Research Institute, Golden, Colorado and University of Colorado, Boulder, Colorado

NREL Publication Number

ACNR/CP-212-12286

Cite this

@conference{8a736c10936145fdafd5dc33aa4b36cf,

title = "Hydrogen-Plasma Reactive Flush for a-Si:H and a-SiGe:H Solar Cell Fabrication",

author = "NREL",

note = "Work performed at Solar Energy Research Institute, Golden, Colorado and University of Colorado, Boulder, Colorado; Twenty First IEEE Photovoltaic Specialists Conference - 1990 ; Conference date: 21-05-1990 Through 25-05-1990",

year = "1990",

language = "American English",

pages = "1416--1419",

}

TY - CONF

T1 - Hydrogen-Plasma Reactive Flush for a-Si:H and a-SiGe:H Solar Cell Fabrication

AU - NREL, null

N1 - Work performed at Solar Energy Research Institute, Golden, Colorado and University of Colorado, Boulder, Colorado

PY - 1990

Y1 - 1990

M3 - Paper

SP - 1416

EP - 1419

T2 - Twenty First IEEE Photovoltaic Specialists Conference - 1990

Y2 - 21 May 1990 through 25 May 1990

ER -