Hydrogenated Amorphous Silicon Films by 60 Hz Glow-Discharge Depostion

Research output: Contribution to journal › Article › peer-review

NREL Publication Number

@article{6a5a4a36e0b24cb49e5b348b236ced1b,

title = "Hydrogenated Amorphous Silicon Films by 60 Hz Glow-Discharge Depostion",

author = "NREL",

year = "1993",

doi = "10.1063/1.355228",

language = "American English",

volume = "74",

pages = "668--671",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "1",

}