Hydrogenated Amorphous Silicon Grown by Hot-Wire CVD at Deposition Rates up to 1 um/Minute

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    PagesA22.8.1-A22.8-6
    Number of pages3
    StatePublished - 2001
    EventAmorphous and Heterogeneous Silicon Thin Films 2000: Materials Research Society Symposium - San Francisco, California
    Duration: 24 Apr 200028 Apr 2000

    Conference

    ConferenceAmorphous and Heterogeneous Silicon Thin Films 2000: Materials Research Society Symposium
    CitySan Francisco, California
    Period24/04/0028/04/00

    NREL Publication Number

    • NREL/CP-520-28340

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