Hydrogenation of Bulk Si from SiNx:H Films: What Really Ends Up in the Si?

Hydrogenation of Bulk Si from SiNx:H Films: What Really Ends Up in the Si?

Research output: Contribution to conference › Paper

Original language	American English
Number of pages	4
State	Published - 2003
Event	NCPV and Solar Program Review Meeting - Denver, Colorado Duration: 24 Mar 2003 → 26 Mar 2003

Conference

Conference	NCPV and Solar Program Review Meeting
City	Denver, Colorado
Period	24/03/03 → 26/03/03

Bibliographical note

Work performed by Lehigh University, Bethlehem, Pennsylvania; Texas Tech University, Lubbock, Texas; Georgia Institute of Technology, Atlanta, Georgia; California Institute of Technology, Pasadena, California; RWE Schott Solar, Inc., Billerica, Massachusetts

NREL Publication Number

NREL/CP-520-35691

Cite this

@conference{01b99f849cd24ab0b2e7dd9fee06408e,

title = "Hydrogenation of Bulk Si from SiNx:H Films: What Really Ends Up in the Si?",

author = "NREL",

note = "Work performed by Lehigh University, Bethlehem, Pennsylvania; Texas Tech University, Lubbock, Texas; Georgia Institute of Technology, Atlanta, Georgia; California Institute of Technology, Pasadena, California; RWE Schott Solar, Inc., Billerica, Massachusetts; NCPV and Solar Program Review Meeting ; Conference date: 24-03-2003 Through 26-03-2003",