TY - JOUR
T1 - Identification of Bonded Species in Hydrogenated Fluorinated Amorphous Silicon
AU - Langford, A. A.
AU - Nelson, B. P.
AU - Fleet, M. L.
AU - Crandall, R. S.
PY - 1990
Y1 - 1990
N2 - The bonded species in hydrogenated fluorinated amorphous silicon (a-Si:H:F) have been identified in the infrared spectra as SiH2 (2100, 890, and 630 cm-1), SiH (2000 and 630 cm-1), SiF4 (1015 cm-1), SiF2 (930 cm-1), and SiF (830 cm-1), or alternatively as SiH (2000 and 630 cm-1), SiF4 (1015 cm-1), SiF2 (930 cm-1), and SiHF (2100, 890, 830, and 630 cm-1). To distinguish between these configurations, we have deposited deuterated fluorinated amorphous silicon (a-Si:D:F) by dc glow discharge and measured the infrared spectrum. Based on the isotopic shifts of the vibrational modes, we conclude that SiHF is not present, and thus support the former assignments.
AB - The bonded species in hydrogenated fluorinated amorphous silicon (a-Si:H:F) have been identified in the infrared spectra as SiH2 (2100, 890, and 630 cm-1), SiH (2000 and 630 cm-1), SiF4 (1015 cm-1), SiF2 (930 cm-1), and SiF (830 cm-1), or alternatively as SiH (2000 and 630 cm-1), SiF4 (1015 cm-1), SiF2 (930 cm-1), and SiHF (2100, 890, 830, and 630 cm-1). To distinguish between these configurations, we have deposited deuterated fluorinated amorphous silicon (a-Si:D:F) by dc glow discharge and measured the infrared spectrum. Based on the isotopic shifts of the vibrational modes, we conclude that SiHF is not present, and thus support the former assignments.
UR - http://www.scopus.com/inward/record.url?scp=25744478831&partnerID=8YFLogxK
U2 - 10.1103/PhysRevB.42.7245
DO - 10.1103/PhysRevB.42.7245
M3 - Article
AN - SCOPUS:25744478831
SN - 0163-1829
VL - 42
SP - 7245
EP - 7248
JO - Physical Review B
JF - Physical Review B
IS - 11
ER -