Identification of Bonded Species in Hydrogenated Fluorinated Amorphous Silicon

A. A. Langford, B. P. Nelson, M. L. Fleet, R. S. Crandall

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12 Scopus Citations

Abstract

The bonded species in hydrogenated fluorinated amorphous silicon (a-Si:H:F) have been identified in the infrared spectra as SiH2 (2100, 890, and 630 cm-1), SiH (2000 and 630 cm-1), SiF4 (1015 cm-1), SiF2 (930 cm-1), and SiF (830 cm-1), or alternatively as SiH (2000 and 630 cm-1), SiF4 (1015 cm-1), SiF2 (930 cm-1), and SiHF (2100, 890, 830, and 630 cm-1). To distinguish between these configurations, we have deposited deuterated fluorinated amorphous silicon (a-Si:D:F) by dc glow discharge and measured the infrared spectrum. Based on the isotopic shifts of the vibrational modes, we conclude that SiHF is not present, and thus support the former assignments.

Original languageAmerican English
Pages (from-to)7245-7248
Number of pages4
JournalPhysical Review B
Volume42
Issue number11
DOIs
StatePublished - 1990

NREL Publication Number

  • ACNR/JA-212-11659

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