Improved Electrical Performance of a-Si:H Thin Film Transistors, TFTs with n+ ..mu..c-Si Contact, and Silicon Oxide and Nitride Dual-Layer Dielectrics

Improved Electrical Performance of a-Si:H Thin Film Transistors, TFTs with n+ ..mu..c-Si Contact, and Silicon Oxide and Nitride Dual-Layer Dielectrics

Research output: Contribution to conference › Paper

Original language	American English
Pages	871-876
Number of pages	6
State	Published - 1993
Event	Amorphous Silicon Technology - 1993: Materials Research Society Symposium - San Francisco, California Duration: 13 Apr 1993 → 16 Apr 1993

Conference

Conference	Amorphous Silicon Technology - 1993: Materials Research Society Symposium
City	San Francisco, California
Period	13/04/93 → 16/04/93

Bibliographical note

Work performed by North Carolina State University, Raleigh, North Carolina

NREL Publication Number

ACNR/CP-14381

Cite this

@conference{f6d5619ad1404d498202fb8fd2b1ce29,

title = "Improved Electrical Performance of a-Si:H Thin Film Transistors, TFTs with n+ ..mu..c-Si Contact, and Silicon Oxide and Nitride Dual-Layer Dielectrics",

author = "NREL",

note = "Work performed by North Carolina State University, Raleigh, North Carolina; Amorphous Silicon Technology - 1993: Materials Research Society Symposium ; Conference date: 13-04-1993 Through 16-04-1993",

year = "1993",

language = "American English",

pages = "871--876",

}

TY - CONF

T1 - Improved Electrical Performance of a-Si:H Thin Film Transistors, TFTs with n+ ..mu..c-Si Contact, and Silicon Oxide and Nitride Dual-Layer Dielectrics

AU - NREL, null

N1 - Work performed by North Carolina State University, Raleigh, North Carolina

PY - 1993

Y1 - 1993

M3 - Paper

SP - 871

EP - 876

T2 - Amorphous Silicon Technology - 1993: Materials Research Society Symposium

Y2 - 13 April 1993 through 16 April 1993

ER -